ILT recently designed and built a system that was engineered for scribing features on the surface of Si wafers. The system consists of XY and rotary motion to position the wafer under the beam delivery and camera sub-systems.
The laser used is a 355nm DPSS 1W laser routed through a 2-axis galvo and F-theta lens. ILT's machine
vision (Cognex VisionPro )
is used to locate features
on the wafer prior to
scribing to ensure the best
possible accuracy on
the part.
With Configure-To-Order (CTO), customers can choose from a menu of options to include the features they need for their laser workstation. By using a configured-to-order (CTO) solution, customers can reduce cost and ensure faster delivery.
Engineered-to-Order
ILT's Engineered-To-Order (ETO) laser workstations are designed around the customer's specification to ensure the customer is getting precisely what they need. Each ETO station is one of a kind, designed to meet the customer's exact specifications.
Reliability
ILT systems are highly regarded for their reliability. ILT's laser workstations are built with proven components and tested thoroughly before shipping which contributes to ILT's outstanding up-time record. ILT has satisfied customers worldwide.
Features and Options
Whether you need a workstation that is configured-to-order or engineered-to-order, your ILT station can include fully integrated features such as:
Vision-assisted automation
Parts handling
Motion control
Programmable Shield Gas
Hermetic Leak Testing
Nd:YAG, CO2 or Fiber lasers
System / Process Statistics
Basic / Advanced Data Management
Remote Data Interface
21CFR Part 11 solution
Every system comes complete with our control software HMI-2200.